@misc{W2152231616,
  author = {Agedi Boto and Pieter Kok and Daniel S. Abrams and Samuel L. Braunstein and Colin P. Williams and Jonathan P. Dowling},
  title = {Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Diffraction Limit},
  year = {2000},
  howpublished = {Physical Review Letters},
  doi = {https://doi.org/10.1103/physrevlett.85.2733}
}